TY  - DATA
AU  - Deulin, E. A., author.
TI  - Mechanics and Physics of Precise Vacuum Mechanisms
SN  - 9789048125203, 978-90-481-2520-3
U1  - 620.0042, 
PY  - 2010///
CY  - Dordrecht
PB  - Springer Netherlands
KW  - Chemistry, inorganic
KW  - Engineering, general
KW  - Surfaces and Interfaces, Thin Films
KW  - Tribology, Corrosion and Coatings
KW  - Vibration, Dynamical Systems, Control
KW  - Engineering
KW  - Engineering design
KW  - Engineering Design
KW  - Surfaces (Physics)
KW  - Vibration
N1  - Physics and Astronomy (Springer-11651)
UR  - http://dx.doi.org/10.1007/978-90-481-2520-3
ER  -