TY - DATA AU - Yatsui, Takashi., author. TI - Nanophotonic Fabrication SN - 9783642241727, 978-3-642-24172-7 U1 - 621.36, PY - 2012/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Microwaves, RF and Optical Engineering KW - Optics, Optoelectronics, Plasmonics and Optical Devices KW - Applied and Technical Physics KW - Engineering KW - Microwaves KW - Nanoscale Science and Technology KW - Nanotechnology KW - Nanotechnology and Microengineering KW - Physics N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/978-3-642-24172-7 ER -