TY - DATA AU - Osellame, Roberto., editor. TI - Femtosecond Laser Micromachining SN - 9783642233661, 978-3-642-23366-1 U1 - 621.36, PY - 2012/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Laser Technology, Photonics KW - Microwaves, RF and Optical Engineering KW - Optics, Optoelectronics, Plasmonics and Optical Devices KW - Materials KW - Microwaves KW - Optical and Electronic Materials KW - Optical materials KW - Physics KW - Semiconductors KW - Structural Materials N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/978-3-642-23366-1 ER -