TY  - DATA
AU  - Sugioka, Koji., editor.
TI  - Laser Precision Microfabrication
SN  - 9783642105234, 978-3-642-10523-4
U1  - 621.36, 
PY  - 2010///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Laser Technology, Photonics
KW  - Nanotechnology
KW  - Physics
N1  - Physics and Astronomy (Springer-11651)
UR  - http://dx.doi.org/10.1007/978-3-642-10523-4
ER  -