TY  - DATA
AU  - Yoshimura, Nagamitsu., author.
TI  - Vacuum Technology
SN  - 9783540744337, 978-3-540-74433-7
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Measurement Science, Instrumentation
KW  - Engineering
KW  - Machinery and Machine Elements
KW  - Materials Science
KW  - Nanotechnology
KW  - Particles (Nuclear physics)
KW  - Physics
KW  - Solid State Physics and Spectroscopy
KW  - Weights and measures
N1  - Physics and Astronomy (Springer-11651)
UR  - http://dx.doi.org/10.1007/978-3-540-74433-7
ER  -