TY  - DATA
AU  - Schubert, Mathias., author.
TI  - Infrared Ellipsometry on Semiconductor Layer Structures
SN  - 9783540447016, 978-3-540-44701-6
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Applied Optics, Optoelectronics, Optical Devices
KW  - Surfaces and Interfaces, Thin Films
KW  - Chemistry
KW  - Optical and Electronic Materials
KW  - Optical materials
KW  - Physical optics
KW  - Physics and Applied Physics in Engineering
KW  - Surfaces (Physics)
N1  - Physics and Astronomy (Springer-11651)
UR  - http://dx.doi.org/10.1007/b11964
ER  -