TY - DATA AU - Behrisch, Rainer., editor. TI - Sputtering by Particle Bombardment SN - 9783540445029, 978-3-540-44502-9 PY - 2007/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Atoms and Molecules in Strong Fields, Plasma Physics KW - Surfaces and Interfaces, Thin Films KW - Chemistry KW - Plasma (Ionized gases) KW - Surfaces (Physics) N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/978-3-540-44502-9 ER -