TY - DATA AU - Ukita, Hiroo., author. TI - Micromechanical Photonics SN - 9783540313724, 978-3-540-31372-4 PY - 2006/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Applied Optics, Optoelectronics, Optical Devices KW - Microwaves, RF and Optical Engineering KW - Mechanics KW - Microwaves KW - Physical optics KW - Physics KW - Physics and Applied Physics in Engineering N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/978-3-540-31372-4 ER -