TY - DATA AU - Basting, Dirk., editor. TI - Excimer Laser Technology SN - 9783540266679, 978-3-540-26667-9 PY - 2005/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Chemistry, Physical organic KW - Electromagnetism, Optics and Lasers KW - Laser Technology and Physics, Photonics KW - Measurement Science, Instrumentation KW - Electromagnetism KW - Laser physics KW - Physical Chemistry KW - Physics KW - Physics and Applied Physics in Engineering KW - Weights and measures N1 - Physics and Astronomy (Springer-11651) UR - http://dx.doi.org/10.1007/b137894 ER -