TY  - DATA
AU  - Giannuzzi, Lucille A., editor.
TI  - Introduction to Focused Ion Beams
SN  - 9780387233130, 978-0-387-23313-0
U1  - 530.41, 
PY  - 2005///
CY  - Boston, MA
PB  - Springer US
KW  - Surfaces and Interfaces, Thin Films
KW  - Condensed matter
KW  - Condensed Matter
KW  - Optical and Electronic Materials
KW  - Optical materials
KW  - Particles (Nuclear physics)
KW  - Physics
KW  - Solid State Physics and Spectroscopy
KW  - Surfaces (Physics)
N1  - Physics and Astronomy (Springer-11651)
UR  - http://dx.doi.org/10.1007/b101190
ER  -