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Materials science of thin films:deposition and structure Milton Ohring

By: Ohring, MiltonMaterial type: TextTextLanguage: English Publication details: San Diego Academic Press INC.( Elsevier) 2002 Edition: 2nd. edDescription: xxi, 794pISBN: 9788131202791Subject(s): MATERIALS SCIENCE | THIN FILM EVAPORATION PROCESS | VACCUM SCIENCE TECHNOLOGYDDC classification: 539.216
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