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Fast simulation of electrothermal MEMS

Bechtold, T

Fast simulation of electrothermal MEMS T. Bechtold - 1st ed. - Heidelberg Springer 2007 - xi,180p.

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ISBN: 9783540346128

Subjects--Topical Terms:
EFFICIENT DYNAMIC COMPACT MODELS
ELECTRO THERMAL MEMS
FAST SIMULATION

Dewey Class. No.: 681.527.6 / BEC-F

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